Turn the mains "A" on. Look here if you can't find the main power switch.
Turn on the pump power by pressing "K". Make sure "L", the pump half-speed setting, is NOT pushed in. The green LED's in the indicator "M" will start lighting. To make sure there is a good vacuum seal, trying lifting the sputter head upwards slightly. If it doesn't move-- then the chamber is sealed. f one can lift it then there is a major leak. Turn the pump off using "K" and check for leaks.
In time the pressure will drop below 10-3 mbar on the black scale and the gauges will switch. The indicator "J" will go on indicating that the scale "I" is reading the cold cathode gauge on the red scale.
Wait until the pressure reaches the desired base pressure. For best results, the base pressure should be < 10-4 mbar. The absolute base pressure is between 10-6 and 5x10-5 mbar. The time to reach the base pressure is determined by many factors including cleanliness while handling the components of the sputter coating (e.g. bare hands vs. gloves), the porosity of the samples (e.g. mesoporous silica), any water or solvents present in samples (e.g. clay minerals, sample mounting (e.g. Ag or C paints). An empty chamber should pump to 5x10-5 mbar in roughly 30-40 minutes.
- Make sure "half speed" isn't set.
- Turn pumping on.
- Turn gauging on.
- Wait for < 10-4 mbar base pressure.
- Continue to AuPd Coating Procedure Part 3: Configuring Plasma